TODAY’S PATENT – MULTI-STATION TOOL WITH WAFER TRANSFER MICROCLIMATE SYSTEMS

Today’s patent was invented by Mohsen Salek, Richard M. Blank, Richard Howard Gould and  Efrain Quiles on December 24, 2019, bearing patent no. US10515834B2.

It is revealed systems and methods for creating buffer gas microclimates around semiconductor wafers outside of a semiconductor processing chamber. Slot doors that permit the removal of single wafers from a multi-wafer stack while restricting the release of buffer gas from a multi-wafer storage system may be a component of such systems, as well as buffer gas distributors that move in tandem with robot arms used to transport wafers for at least some of the movements of such robot arms.